• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to an optical measuring device for in-situ detection of a distance difference (6) between a carrier (8) and an edge region (10) of an object (12) to be measured. The optical measuring device has a measuring head (14) with dual beam guidance (15), which has a first measuring beam (16) on the carrier (8) and a second measuring beam (18) on the edge region (10) of the object (12) to be measured. directed. Means for detecting and forming reflection spectra of the first measuring beam (16) directed at the carrier (8) and the second measuring beam (18) directed at the edge region (10) of the object (12) to be measured are provided. The measuring device has a multichannel measuring device (34) with a spectrometer line (72). An evaluation unit (32) for the reflection spectra for detecting the step height between the support (8) and the edge region (10) of the object (12) is in operative connection with a spectrometer (48) and a display device (66).
    公开号:AT514500A1
    申请号:T50423/2014
    申请日:2014-06-17
    公开日:2015-01-15
    发明作者:
    申请人:Precitec Optronik Gmbh；
    IPC主号:
    专利说明:

    The invention relates to an optical measuring device for detecting distance differences and an optical measuring method using the measuring device.
    An optical measuring device for measuring surfaces is known from the publication DE 10 2008 041 062 A1. The known measuring device generates a measuring light beam which, after passing through at least three separately focusing optical components, impinges on the surface of the object, is reflected therefrom and is detected by a spatially resolving light detector together with a reference light after interfering superimposition.
    For this purpose, the known measuring device has an optical assembly, which comprises the at least three separately focusing optical components. The major axes of these separately focusing optical components are offset from each other and arranged side by side. In addition, the known measuring device has a beam splitter arranged in a beam path of the measuring light beam. In addition, a reference surface is provided for the known device and a spatially resolving light detector.
    The light source, the beam splitter and the optical subassembly are arranged relative to one another in such a way that the measuring light emitting from the light source and passing through the focusing optical component strikes the surface and is reflected by it and strikes the detector via the focusing optical components. In addition, the known measuring device has an evaluation system for receiving image data from the spatially resolving light detector and for outputting measurement data representing a surface shape of the surface. For this purpose, distance values representing a distance of a location of the surface from the focusing optical components are detected. From these distance values, the evaluation system forms parameters that represent the surface shape of the surface.
    In addition, the above document discloses a method for measuring a surface of an object which essentially comprises the following method steps: First, a measurement light is generated. From the measuring light, three convergent partial beams of a first part of the measuring light are formed in order to illuminate three spaced-apart areas of the surface of the object. The reflected Lichtbzw. the three partial beams of the light reflected from the surface are directed together with a second part of the measuring light onto a spatially resolving detector in order to form interferences there. These interferences are finally analyzed by a detector detecting light intensities to represent the surface shape of the surface of the object by corresponding measurement data.
    Further known processes are described in the publications DE 102008 041 062 A1, US Pat. No. 7,826,068 B2, US 2009/0078888 A1, WO2013 / 070732 A1, US Pat. No. 7,853,429 B2, US Pat. No. 7,443,517 B2, DE 10 2011081 596 A1, DE 10 2011 055 735, and KR 10 2008 0112436. For a step measurement between a rotating carrier and a rotating edge region of an object to be measured, in particular an object to be thinned, there is the need to provide a robust measuring device with limited space requirements and at the same time an increased environmental load.
    Conventional rugged step-measuring instruments therefore continue to operate with tactile measuring tips, with a measuring tip scanning the surface of a narrow exposed edge portion of the object to be measured and a second measuring tip disposed on the rotating carrier top, such that from the detectable distances between the two measuring points, the step height arising during machining in the millimeter range up to multiple micrometer ranges, can be detected. A difficulty of such actinactile measuring method lies in the suitable dosage of the pressure force, on the one hand on the edge region of the object to be measured and on the other hand on the surface of the carrier material.
    If the pressure force is too high, damage to the edge areas of the object to be measured can not be ruled out, especially since a large number of grinding rotations of the object is required in order to thin the object from a thickness in the range of millimeters to thicknesses in the range below 100 micrometers. If the pressure force is too low, there are disturbances, since the tip is exposed to considerable measurement errors and measurement inaccuracies, at least on the relatively rough carrier upper side, due to abrasive particles which are formed during thinning.
    There is a need for a robust measuring device and a correspondingly robust measuring method that overcomes the disadvantages of the prior art while being reliable
    Delivers results
    There is provided an optical measuring device having the features of independent claim 1 and a measuring method having the features of independent claim 14.
    In this context, a chromatic-confocal distance measuring technique is understood to mean a method which makes use of the effect that lenses have different focal points for different wavelengths of the light. The chromatic-confocal distance measurement uses the dispersion of spectrally broadband light in an optical imaging system in order to precisely determine the distance of a reflecting surface to the measuring head. A spectrally broadband spotlight source, which is usually realized by a first aperture stop or an optical fiber end, is focused on the object in the optical imaging system. The distance of the focus from the imaging system is an unambiguous, well-defined function of the wavelength. The reflected light is remapped via the same imaging system and coupled out from the illumination beam path and imaged on a pinhole located at the mirror point of a beam splitter. Alternatively, the reflected light can also be fed back directly into the first pinhole and then decoupled. A detector behind the pinhole then determines the dominant wavelength of the reflected light. From the knowledge of the focal length of the individual wavelengths, the object distance can be determined directly from the dominant wavelength. An advantage of this method is the absence of moving components.
    In addition, optical coherence tomography (OCT) refers to an examination method in which spectrally broadband light is used with the aid of an interferometer for the distance measurement of objects. The object under examination is scanned point by point. In this case, an arm with a known optical path length is used as reference to a measuring arm. The interference of the partial waves from both arms then gives a pattern from which the difference in the optical path length of the two arms can be read.
    A distinction is made between two spectrally interferometric measurement and evaluation methods, the so-called "TimeDomain OCT". and the Frequency Domain OCT. Therefore, on the one hand spoken of a signal in the time domain (Time Domain (TD)) and on the other hand of a signal in the frequency domain (Fre¬quency Domain (FD)). This means that either the frequency arm is changed in its length and the intensity of the interference is measured continuously, without consideration being given to the spectrum (time domain), or the interference of the individual spectral components is detected (frequency domain).
    The measuring device and the measuring method according to the present application is advantageously applicable both with a chromatic-confocal and an interferometric distance measuring technique. This applies in particular to an application with an in situ reduction of the step height during the processing of a rotating measuring object to be measured or thinned and a rotating support.
    In particular, in order to provide a reliable, non-contact and in the grinding environment robust measurement technique, in a first embodiment of the invention, an optical measuring device for distance difference detection can be used, which has a measuring head with dual beam guidance, the first measuring beam on the carrier and a second measuring beam directed to the edge region of the object.
    In addition, the optical measuring device has a measuring head guiding device, in which the measuring head is arranged for detecting the step height. Furthermore, the optical measuring device has a spectrally broadband light source which generates light beams. A corresponding measuring head optics can image at least a first measuring point on the carrier and a second measuring point on the edge region of the object. Means for detecting and forming reflection spectrums of the first measurement beam directed onto the carrier and the second measurement beam directed onto the edge region of the object to be measured cooperate with a reflection spectral evaluation unit for detecting the step height between the carrier and the edge region of the object.
    An advantage of this optical measuring device is the dual beam guidance of the measuring head, which is achieved in a further embodiment of the invention by the insertion of two adjacent measuring heads in the Meßkopfführungsvorrichtung, wherein a first measuring beam to the surface of Träger next to the edge region of the measuring object is aligned and a second measuring beam of the second measuring head scans the edge region of the object to be measured in situ.
    In a further embodiment of the invention, it is possible to achieve a measuring beam split by a corresponding measuring optics in the measuring head such that a first measuring spot on the surface of the carrier generates reflections suitable for distance evaluation and a second measuring spot adjacent to the edge area of the object to be measured generated, which are also suitable for a Abstandauswer¬tung in the optical measuring device. The difference between the two distance results can constantly check the decrease in thickness of the object to be measured and display it in situ in a corresponding display.
    The sampling rate of, for example, 4 kHz makes it possible to detect outliers and thus measurement errors and to eliminate them by a suitable digital measuring filter. Since more than four thousand samples per second can be detected, a reliable elimination of incorrect measurements by dust and aerosol particles can be carried out and a robust measurement result filtered out, so that despite the difficult field conditions a robust reliable measurement of the decrease of the step height with the aid of this optical measuring device he follows.
    The robustness of the measuring method can be increased by selecting a light wavelength range for the broadband light source for the measurement, for which both the material of the carrier and the material of the object to be measured are intransparent.
    In a further embodiment of the invention, it is provided to provide the measuring head for an in situ chromatic-confocal detection of the step height. Moreover, it is also provided to equip the measuring device with a measuring head for in situ interferometric detection of step heights. By a straightforward change of the measuring heads and the measuring programs, it is possible to switch from one method to the other method and to achieve an optimum adaptation of the optical measuring device to the measuring environment.
    As already mentioned above, the optical measuring device can have a measuring head which has two optical measuring heads of a multichannel measuring device arranged next to each other and mechanically connected in the measuring head guiding device. However, a similar compact measuring head in the measuring head guiding device still works with distance-difference detection with two independent measured-value recording systems.
    In a further embodiment of the invention, the measuring head can have two measuring fibers which are mechanically alignable and interact with the multi-channel measuring device, preferably with a two-channel measuring device. Such a measuring head also works with two independent measuring systems.
    In this case, the two measuring head fibers of the optical measuring device can be supplied via a fiber-optic Y-coupler which decouples the light of the spectrally broadband light source in two optical fibers. Even if the optical measuring method requires a reference measuring path, it can be implemented relatively robustly by fiber-optic measures, in which only one fiber-optic piece is mirrored on one side and can be integrated into a robust fiber-optic strand.
    For evaluating the reflected light from the two measuring points, on the one hand from the top of the carrier and to the other from the surface of the edge region of the object to be measured, the multichannel measuring device can have at least two spectrometers. Alternatively, it is also possible for only one spectrometer to be used and for a multiplexer to be provided which in multiplex mode alternately feeds the scanning results of the first measuring beam and the second measuring beam to a single spectrometer via an optical fiber. On the other hand, the multi-channel measuring device can have a multi-line detector which represents a cost-effective alternative.
    In a further embodiment of the invention, it is provided to equip the optical measuring device with at least one spectrometer line with which the measured distance peaks can be represented and evaluated as a measure of the step height. For this purpose, the same spectrometer line is used for the detection and measurement of the reflected light of the first measuring beam as well as for the detection and measurement of the reflected light of the second measuring beam. If there are multiple pairs of probes to measure multiple pitch differences, then the spectrometer may or may not have multiple rows of spectrometers. Thus, there are embodiments in which it is possible to measure with the aid of a single spectral vector line the light of several pairs of measuring heads.
    In other embodiments, where spectral interferometric methods are applied additionally or alternately, an equalization and then a Fourier transformation, or a so-called fast Fourier transformation FFT, are preferably performed first from this the distance peaks to certain.
    Advantageously, to realize a plurality of measuring channels, each measuring head can be connected separately to a light pipe, in particular an optical fiber, whereby the light is thereby supplied separately to the common spectrometer row assigned to all measuring heads, specifically via separate optical fibers. For this purpose, each of the light pipes or optical fibers can be connected to one input of the multichannel meter, and within the multichannel meter, the inputs can each be disconnected, that is, connected to the spectrometer with an individual dedicated light pipe. At the entrance of the spectrometer, the light pipes or optical fibers can each terminate in a fiber plug, the fiber plugs being mounted in a holder for fiber plug, which may be arranged in front of a collimator lens of the spectrometer.
    As a result, it is possible to realize a particularly robust and accurate multichannel, which is also cost-effective.
    In a further embodiment of the invention, the optical measuring device has means for digitizing reflection spectra of the first measuring beam directed onto the carrier and of the second measuring beam directed onto the edge region of the object to be measured. For these digitized reflection spectra, which can be used to detect the step height between the support and the edge region of the object, the measuring device has an evaluation unit.
    In this case, as already mentioned above, measurement outliers, caused by the environment with abrasive removal particles, aerosol particles or dust particles due to the high optical scanning rate of, for example, at least 4 kHz can be detected and filtered out by means of an electronic filter, as already mentioned above. It is also possible to protect the environment of the dual measuring beam by gas purging or liquid rinsing, taking into account the refractive indices that have changed compared to an air environment.
    A further aspect of the invention relates to an optical measuring method for detecting in situ a distance difference between a carrier and an edge region of an object to be measured. For this purpose, the measuring method comprises the following method steps. There is provided an optical measuring apparatus having a dual beam guidance measuring head in a measuring head guiding apparatus for distance detection to the surface of the substrate and to the surface of the peripheral area of the object to be measured.
    Subsequently, a spectrally broadband light of a light source is applied via optical fibers and the measuring head optics as a measuring spot on the surface of the carrier and on the surface of the edge region of the object to be measured. Thereby, the reflected measuring beams are fed back into measuring channels of the measuring device, which has at least one interference spectrometer, the reflection spectra of the reflected light beams being detected by the interference spectrometer.
    Thereafter, the reflection spectra are evaluated by calculating systematic and extreme measurement errors and determining in situ the progressively decreasing thickness of the object to be measured.
    This method enables a robust monitoring of the thinning of an object, such as a semiconductor wafer or a ceramic wafer, held in a corresponding looping device and rotated about an axis, but an edge region of the object to be measured for a step height measurement counter-rotating carrier is available.
    The rotating support is usually a sanding disk rotating about a rotation axis with a significantly larger radius than the diameter of the disk-shaped object to be measured, so that a plurality of objects to be measured can be arranged on the sanding disk. Each of the objects to be measured is held on the surface of the grinding disc by a rotating holder, whereby the diameter of such objects to be measured can be greater than 10 inches and the starting thicknesses of such objects to be measured can be in the millimeter range, which can then be reversed by means of the grinding disc of the carrier and the holder can be thinned to thicknesses of less than 100 micrometers.
    The method, due to its high sampling rate of more than four thousand samples per second, has the potential to detect, eliminate and eliminate measurement errors due to perturbations that may occur from abrasive particles due to abrasive dust or aerosols from air and abrasive paste particles, as well as other stochastic or periodic measurement errors that a robust monitoring of the decrease of the thickness of the object to be measured is to be ensured, since such measuring outliers can be filtered out electronically due to the high sampling rate.
    System-inherent errors, such as may occur due to curvature of the surface of the carrier or due to vibrations of the entire loop structure, can be detected and eliminated with the aid of the dual beam guide and the downstream evaluation unit, so that a relatively robust measuring method for this problematic environment of the grinding machine can be provided by the two independent Meßwerterfas¬sungssysteme.
    For this purpose, in a preferred embodiment of the method, the measuring head in the measuring head guiding device can have two mutually adjacent and mechanically connected optical measuring heads of a multichannel measuring device. Such an optical measuring device has the advantage that interactions between the two measuring heads and thus between the distance measurement results can not occur here.
    Moreover, it is possible for the measuring head to have two measuring fibers which are mechanically alignable and cooperate with the multi-channel measuring device, preferably with a two-channel measuring device. Such a measuring head, which has only two individual fibers or fiber bundles, can be made relatively compact and therefore adapted to a thin-grinding device without requiring too much space.
    In addition, such fiber-technical solutions can also be used to decouple the light of the spectrally broadband light source into two light fibers via a fiber-optic Y-coupler in a further embodiment.
    During the measurement, a first measuring point on the carrier and a second measuring point on the edge region of the object to be measured are formed, and the respective distances to the measuring head are detected and the step height is measured by subtraction.
    As already mentioned above, two different measuring methods can be used for the method, namely the chromatic-confocal measuring method for detecting the step height or the interferometric measuring method.
    It is of particular advantage to digitize the reflection spectra of the first measuring beam directed onto the carrier and of the second measuring beam directed onto the edge region of the object to be measured. By digitizing, it is possible to eliminate the outliers by abrasive particles in the vicinity of an abrasive system, for example, by the above-mentioned electronic filter. Thus, the erfin¬Dungsgemäße measurement method is extremely robust in the environment of Abschlifanlagen.
    Because the measuring heads are not carried out separately but as a double measuring head, only a small space requirement is claimed for the optics, which makes the device particularly suitable for in situ measurements and in situ tests of object heights, for example when grinding semiconductor wafers or ceramic disks for the electronics. Moreover, the steps involved in the grinding of objects correspond to the edge areas of a plurality of optical wavelengths. The optical measuring device and the method can also be used under ambient conditions of a production operation charged with grinding dusts, grinding pastes and aerosols, particularly in the case of optical step measurements on rotating surfaces.
    The invention will now be explained in more detail with reference to the attached figures.
    FIG. 1 shows a schematic diagram of an optical measuring device for detecting a distance difference in use on a thin-grinding system according to an embodiment of the invention,
    FIG. 2 shows a measuring head of the device according to FIG. 1 in detail,
    FIG. 3 shows a modification of the measuring head according to FIG. 1 in detail,
    FIG. 4 shows a schematic diagram of an optical measuring device for detecting a distance difference according to an embodiment of the invention, in which the optical measuring device has 2 measuring heads and a multichannel measuring device with a spectrometer with a single spectrometer line, and
    FIG. 5 shows a schematic diagram of an optical measuring device for detecting a distance difference according to an embodiment of the invention, where the optical measuring device has 2n measuring heads and a multichannel measuring device with a single spectrometer with preferably a single spectrometer.
    1 shows a schematic diagram of an optical measuring device 2 for detecting a distance difference 6, here: a step height in use on a thin-grinding system 50 according to an embodiment of the invention. The thin grinder 50 has a sanding pad 52 whose surface 54 may be covered with a layer 56 of abrasive paste. The sling 52 is rotatably mounted about an axis 58 in the arrow direction. A disc-shaped object 12 to be measured with a thickness d in the millimeter range and a diameter D of more than 10 inches or more 25 cm, which nowadays has large-area finished pre-fabricated memory and / or logic chips on its active top glued to the holder, is pressed by a holder 60 rotating in the direction of arrow B during the grinding operation in the direction of arrow C onto the surface 54 of the grinding disc 52 with the rear side of the object to be measured.
    For this purpose, the diameter of the rotating holder 60 is selected such that an edge region 10 of the disk-shaped object 12 projects beyond the limits of the rotating holder 60, so that a measurable height step 6 between the edge region 10 of the object 12 rotating with the holder 60 and the upper surface 54 of the grinding plate 52, which forms a carrier 8 results. For this purpose, the radius R of the grinding plate 52 is significantly larger than the diameter D of the rotating holder. Thus, a plurality of objects 12 can be arranged on the sanding pad 52 rotating in the direction of arrow A. The rotating holder 60 may have a direction of rotation B opposite to the direction of rotation A of the loop plate 52.
    For measuring the decreasing height level 6 during the thin grinding, a stationary measuring head guiding device 20 of the optical measuring device 2ortsfest is arranged with each holder 60. The measuring head guide device 20 thus maintains a measuring head 14 with a dual beam guide 15 at a stationary position, while the object 12 to be measured rotates in a rotational manner under a second measuring beam 18 of the measuring head 14, in particular in the edge region 10.
    The surface 54 of the grinding pad 52 simultaneously moves under a first measuring beam 16 of the dual beam guide 15, so that the measuring head 14 reflects the reflected light of a first measuring point 28 on the surface 54 of the carrier 8 and a second measuring point 30 on the surface of the edge region 10 of the thinning object 12 in this
    Embodiment of the invention via optical fibers 36 and 38 can supply a multiplexer 40, on the one hand via a light conductor 46 a broadband light from a light source 22 to the measuring head 14 and on the other hand via a Lichtlei¬ter 42, the reflected light components of the measuring points 28 and 30 a spectrometer 48 supplies.
    The spectrometer 48 is connected to an evaluation unit 32 via a sensor line 62, via which digitized interference spectra are supplied via an electronic filter 44 to the evaluation unit 32. In this case, the electronic filter 44 can eliminate measured value outliers, which arise, for example, as a result of the surroundings of the grinding system, so that the evaluation unit 32 can continuously transmit a value for step height measurement, which has been cleared of measuring errors, to a display device 66 via a connecting line 64.
    It goes without saying that in such a grinding system for each object to be measured a Meßkopf¬führungsvorrichtung 20 is provided, each having a responsive measuring head 14 with the downstream measuring and Auswerteinheit, wherein due to the multiplexer 40, a plurality of signals of the required measuring heads evaluated and displayed on the display 66. Depending on the radius R of the grinding disc 52 in relation to the diameter of the objects to be measured, three to sixteen objects 12 to be measured are monitored with corresponding measuring heads 14 and from a thickness d in the millimeter range to a thickness d in the range of a few tens Thinned micrometers.
    FIG. 2 shows a measuring head 14 of the device according to FIG. 1 in detail. This measuring head 14 is held by the measuring head guiding device 20 and comprises two individual measuring heads 140 and 141 held side by side in the measuring head guiding device 20, a first measuring head 140 detecting the distance e between the measuring head 140 and the surface 54 of the carrier 8 and the second individual measuring head 141 interposing the distance c the measuring head 141 and the surface of the edge region 10 of the object 12 to be measured. From the difference of the distances e and c (t) to the non-transparent surfaces of the measuring plate 52 or the edge area of the object 12 to be thinned, the decreasing thickness d (t) = e -c (t) results. ,
    FIG. 3 shows a modification of the measuring head 14 " according to Figg 1 in detail. This modified probe 14 " 2 differs from the measuring head 14 of FIG. 2 in that two separate measuring points are formed by a suitable measuring head optics 26, with measuring point 28 on the carrier 8 and measuring point 30 on the edge area 10 of the object 12 to be measured. The reflected light is fed back into the optical fibers 36 and 38 and forwarded for evaluation to the evaluation unit via the multiplexer 40 and digitizing the interference values of the spectrometer 48, as shown in FIG.
    FIG. 4 shows an optical measuring device 3 according to a third embodiment. The optical measuring device may be used in conjunction with a thin grinder 50, which has been explained above. However, the invention is not limited to such application scenarios. Rather, the invention can be used everywhere where distance differences are to be determined by means of optical measuring methods. These may be distance differences between a support and the surface of an object lying on the support or, for example, distance differences resulting from the shape and shape of an object to be measured. Also completely different applications are conceivable, which will not be detailed here for the sake of simplicity. For example, the measuring of bottles or other objects can be an example of application of the optical measuring device described here.
    However, the optical measuring device 3 is particularly suitable for thickness measurements, in particular of thicknesses of an object, for example a object 11 to be thinned, which lies on a support 12 of a thin-grinding system 50. This is also due to the fact that the optical measuring device 3 can be made particularly compact and robust, since, according to one variant, two measuring heads 140, 141 each can be combined to form a measuring head 14 designed as a double measuring head.
    The elements of the optical measuring device 3 according to the third embodiment as well as the other elements shown in Figure 4 have been partially explained already in connection with the vori¬gen figures, so that they do not have to be described again all in detail here.
    In contrast to the embodiments already explained above, in this embodiment the structure of the multi-channel measuring device 34 is explained according to a particular variant. The multi-channel meter 34 has a spectrometer line 72.
    The spectrometer line 72 is arranged in a spectrometer 72, which further comprises a collimator 73, a grating 74, and a focusing lens 75. Those skilled in the art will recognize that these components are exemplary, and that, for example, the grid 74 may be replaced by a prism in other embodiments.
    Further, the multi-channel meter 34 has a light source 22, which in turn may include a plurality of individual light sources 76. Within the multi-channel measuring device 34, two Y-couplers 77 are arranged, with one input of a Y-coupler each being connected to one of the plurality of light sources 76. In this way, the measuring heads 140, 141 can be particularly efficient with light having a broadband spectrum to be supplied.
    As already mentioned, the measuring heads 140, 141 are arranged in an optical measuring head 14 with dual beam guidance 15, so that a double measuring head is formed. For this purpose, the measuring heads 140, 141 are arranged next to one another in a measuring head guiding device 20 and are mechanically connected to one another. As a result, the optical measuring device in the vicinity of the object to be measured, at which distance differences are to be measured, is carried out in a particularly robust and space-saving manner.
    The light source 22 or the two individual light sources 76 provide spectrally broadband light so that a first measuring beam 16 and a second measuring beam 18 are formed. In this embodiment, the first measuring head 140 directs the first measuring beam 16 to a first measuring point 28 located on the carrier 8, and the second measuring head 141 directs the second measuring beam 18 to a second measuring point 30 located at the edge region 10 of the object 12.
    Means for detecting and forming reflection spectra of the first measuring beam 16 directed at the first measuring point 28 are arranged in the first measuring head 140. Further, means for detecting and forming reflection spectra of the second measuring beam 18 directed to the second measuring point 30 are arranged in the second measuring head 141. The means for detecting and forming reflection spectra may operate according to an interferometric method, wherein the respective measuring head 141, 141 may then comprise a reference mirror and a beam splitter cube (not shown). However, the invention is not limited to such an embodiment. Thus, at least one of the measuring heads 140, 141 can also work according to a chromatic confocal method.
    The two measuring heads 140, 141 are spatially aligned in a predefined manner and, as shown in FIG. 4, may preferably be at a same geometric height. As a result, the measuring head 140, which thus measures a greater distance e, detects a blueer light than the measuring head 141, which thus measures a smaller distance c. In other words, the first measuring head 140 should measure blue light, whereas the second measuring head 141 should measure redder light.
    The light of the reflection spectra is coupled into the multichannel gauge 34 through the optical fibers 36, 38, the first optical fiber 38 connecting the first sensing head 140 to a first input 70 of the multichannel gauge 34, and the second optical fiber 36 connecting the second sensing head 141 to a second input 71 of the multichannel Multi-channel measuring device 34 ver¬bindet. Each input 70, 71 of the multi-channel measuring device corresponds to an individual measuring channel of the optical measuring device. The inputs 70, 71 can be connected via a respective Y-
    Couplers are each connected to the spectrometer 72, as shown in FIG. On the input side, the spectrometer has a holder 78 for fiber connectors. The optical fibers 36, 38 can be guided to the holder 78 via the Y couplers, wherein the light pipes 79 and 80 can be offset in the spectral direction along the direction of the spectrometer line 72.
    The amount of offset 81 can result in a difference in the characteristic curves, as a result of which the reflection spectra from the measuring heads 140, 141 differ. This difference in the characteristic curves is correspondingly taken into account in the subsequent evaluation of the resulting distance peaks. This applies preferably when using chromatic confocal measurement methods. In interferometric measuring methods, for example in the case of an OCT, the light lines 79, 80 should preferably be arranged at the same height in the spectral direction, but instead may be arranged offset from one another perpendicular to the spectrometer line 72. The spectrometer line 72 should detect the complete light detected by the measuring heads 140, 141, which arrives at the spectrometer 34, for which reason the spectrometer line 72 preferably has a sufficiently high height and has a sufficient number of detector pixels.
    A particular advantage of the embodiment shown here can be seen in the fact that only a single spectrometer line 72 is required in order to evaluate the reflection spectra of both measuring heads 140, 141, wherein different characteristics can be present. As a result, a non-interchanging evaluation of the peak position, which corresponds to detector pixels, is also possible.
    FIG. 5 shows a fourth embodiment of the optical measuring device 5. As shown in FIG. 5, the optical measuring device 5 can have a large number of the optical measuring heads 14, with each measuring head 14 having a dual beam guidance, as already explained above.
    Furthermore, each of the measuring heads can operate autonomously to the effect that each distance measuring head 14 can be detected to a distance difference di, in the same way as has already been explained above. All double measuring heads 14 can each be connected to two channels of the multi-channel measuring device 34, so that the optical measuring device 5 has 2n individual measuring heads 140, 141 and a multi-channel measuring device 34 with 2n channels. The multichannel measuring device is in turn equipped with a single spectrometer 48 with a single spectrometer line 72, whereby all measuring signals and all reflection spectra of the measuring heads 140, 141 can be evaluated by the spectrometer line 72. The exemplary embodiments shown in FIGS. 4 and 5 can be combined with exemplary embodiments of FIGS. 1 to 3.
    By way of example, the spectrometer 34 according to the embodiment in FIG. 5 can also have one or more multiplexers. In this case, the multiplexers are preferably arranged such that a different Parr of measuring heads 140, 141 is selected per clock. The frequency and mode of operation of the multiplexer have already been discussed in the context of the above examples, and it is also possible to apply them accordingly. Fer¬ner means may be present, which allow a further distinction of the characteristics. In the case of chroma¬tisch confocal measurement, this is in part already due to the particular arrangement of the 2n light guides 79, 80, each of which can be arranged in a spectral direction at a different position along the direction of the spectrometer line 72 of the spectrometer 48.
    2 optical measuring device (1st embodiment) 3 optical measuring device (3rd embodiment) 4 optical measuring device (2nd embodiment) 5 optical measuring device (4th embodiment) 6 step height 8 carrier 10 edge region 12 object 14, 14 'measuring head 15 dual beam guide 16 first measuring beam 18 second measuring beam 20 measuring head guiding device 22 light source 23 first light beam 24 second light beam 26, 26 " Measuring head optics 28 first measuring point (on carrier) 30 second measuring point (object) 32 evaluation unit 34 multi-channel measuring device 36 optical fiber 38 optical fiber 39 spectrometer 40 multiplexer 42 optical fiber 44 electronic filter 46 optical fiber 48 spectrometer 50 thin grinding system 52 grinding disc 54 surface of the grinding disc 56 layer 58 axis of the grinding disc 60 Holder of the object to be measured 62 Sensor cable 64 Connecting line 66 Indicator 70 Multichannel input 71 Input Multichannel 72 Spectrometer line 75 Focusing lens 76 Light source 77 Y coupler 78 Bracket for fiber connector 79 Optical fiber 80 Optical fiber 81 Displacement in spectral direction 140 Single measuring head 141 Single measuring head A Direction of rotation B Direction of rotation C Direction of rotation c distance D diameter of the object to be measured d thickness e distance R radius of the grinding disc
    权利要求:
    Claims (23)
    [1]
    1. Optical measuring device for detecting distance differences, in particular for the in situ detection of a height of stumps (6) between a carrier (8) and an edge region (10) of an object, (12) comprising: an optical measuring head ( 14, 14 ") with a dual beam guide (15) which is designed as a double measuring head with a first measuring head (140) and a second measuring head (141), a measuring head guiding device (20) in which the first measuring head (140) and the second measuring head (141) are juxtaposed and mechanically connected, at least one spectrally broadband light source (22) for generating light (23, 24) of a first measuring beam (16) and a second measuring beam (18), the first measuring head (140) The first measurement beam (16) is directed to a first measurement point (28) located, for example, on a support (8), and the second measurement head (141) directs the second measurement beam (18) towards, for example, an edge region (10) of the ob¬ jects (12) A means arranged in the first measuring head (140) and the second measuring head (141) for detecting and forming reflection spectra of the first measuring beam (16) directed at the first measuring point (28) and reflection spectra the second measuring beam (18) directed towards the second measuring point (30), a first optical fiber (38) for coupling the reflected light from the first measuring beam (16) and a second optical fiber (36) for coupling the reflected light from the first measuring beam (18) second measuring beam (18) into in each case a different measuring input of a multichannel measuring device (34) with a plurality of measuring inputs, a spectrometer line (34) arranged in the multichannel measuring device (34), with which the reflection spectra of the first measuring beam and the reflection spectra of the second measuring beam (18) can be measured, and an evaluation unit (32), which is connected to the spectrometer line (34) via a sensor line (62), from which the Distance peaks can be formed by the spectrometer line (34) measured reflection spectra of the first Me߬strahls (16) and the second measuring beam (18), and the Ab¬standspeaks can be evaluated as a measure of a distance difference.
    [2]
    2. An optical measuring device according to claim 1, wherein the optical measuring device comprises a plurality of optical measuring heads (14, 14 ") with dual beam guidance (15), wherein each of the optical measuring heads (14, 14") as Dop¬pelmesskopf is formed with a first measuring head (140) and a second measuring head (141).
    [3]
    3. An optical measuring device according to claim 2, wherein each of the first measuring heads (140) and the second measuring heads (141) is in each case connected to a respective optical fiber with a different measuring input of the multi-channel measuring device (34), so that by the multi-channel measuring device ( 34) arranged spectrometer line (72) the reflection spectrum of each of the first Mess¬ heads (140) and the second measuring heads (141) can be evaluated.
    [4]
    An optical measuring device according to any one of the preceding claims, wherein the measuring device is provided with at least one of the first measuring head (140) and the second measuring head (141) for in-situ chromatic-confocal detection of the distance difference (6).
    [5]
    Optical measuring device according to one of the preceding claims, wherein the measuring device (2) is provided with at least one of the first measuring head (140) and the second measuring head (141) for an in-situ interferometric recording of the distance difference (6).
    [6]
    6. Optical measuring device according to one of the preceding claims, wherein the optical measuring device (2) at least one fiber optic Y-coupler per input (70,71) of the multi-channel measuring device (34).
    [7]
    The optical measuring device according to any one of claims 2 to 6, wherein the multi-channel measuring device (34) comprises at least one multiplexer (40) which preferably switches between pairs of each of the first measuring heads (140) and one of the second measuring heads (141).
    [8]
    8. Optical measuring device according to claim 7, wherein the multi-channel measuring device (34) has a multi-line detector.
    [9]
    9. Optical measuring device according to one of the preceding claims, wherein the at least one spectrally broad-banded light source (22) for each first measuring head (140) and each second measuring head (140) each have a light source (76).
    [10]
    An optical measuring device according to any one of the preceding claims, wherein the measuring device (2) comprises means for digitizing reflection spectra of the first measuring beam (16) directed towards the carrier (8) and the second measuring beam (18) directed towards the edge region (10) of the object (12) ) having.
    [11]
    11. Optical measuring device according to claim 10, wherein the measuring device (2) has an evaluation unit (32) for digitalized reflection spectra for detecting the distance difference (6) between carrier (8) and edge region (10) of the object (12).
    [12]
    Optical measuring device according to any one of the preceding claims, wherein the measuring device (2) has an optical scanning rate of at least 4 kHz.
    [13]
    13. Optical measuring device according to one of the preceding claims, wherein the measuring device (2) has an electronic filter (44) in the evaluation unit (32).
    [14]
    14. Optical measuring method for detecting at least one distance difference, in particular for detecting at least one step height (6) between a carrier (8) and an edge region (10) of an object (12), the method comprising the following method steps: providing a Measuring device with an optical measuring head (14, 14 ') with dual beam guidance (15), which is designed as a double measuring head with a first measuring head (140) and a second measuring head (141), in a measuring head guiding device (20). in which the first measuring head (140) and the second measuring head (141) are arranged side by side and mechanically connected (20), generating a first measuring beam (16) through the first measuring head and a second measuring beam (18) through the second measuring head by means of at least one spectrally broadband light source, wherein the first measuring head (140) directs the first measuring beam (16) to a first measuring point (28) and the second measuring head (141) directs the second Directing the measurement beam (18) to a second measurement point (30), each forming reflection spectra, coupling the reflected light from the first measurement beam (16) via a first optical fiber and the reflected light from the second measurement steel (18) via a second optical fiber, respectively a different measuring input of a multichannel measuring device (34) with a plurality of measuring inputs, and measuring the reflection spectra by means of a spectrometer line arranged in the multichannel measuring device and an evaluation unit downstream of the spectrometer line, distance peaks corresponding to distances of the first measuring point from the first measuring head and the second measuring point are formed by the second measuring head and the distance peaks are evaluated as a measure of a distance difference.
    [15]
    15. An optical measuring method according to claim 14, wherein during the measuring operation, the measuring head (14) in the Meßkopfführungs¬vorrichtung (20) is held stationary and the carrier (8) and the object (12) in opposite directions of rotation (A, B ) rotate under the measuring head (14).
    [16]
    16. An optical measuring method according to claim 14 or claim 15, wherein during the measurement a first measuring point (28) is formed on the carrier (8) and a second measuring point (30) is formed on the edge region (10) of the object (12), and the respective ones Distances (c, e) to the measuring head (14) can be detected.
    [17]
    17. Optical measuring method according to one of claims 14 to 16, wherein by subtraction of the detected distance values (c, e) in situ, the decreasing object thickness (d) is documented.
    [18]
    The optical measuring method according to any one of claims 14 to 17, wherein a chromatic-confocal measuring method is used for detecting the distance difference (6).
    [19]
    19. An optical measuring method according to any one of claims 14 to 17, wherein an interferometric measuring method for detecting the distance difference (6) is used.
    [20]
    20. An optical measuring method according to any one of claims 14 to 19, wherein the light of the spectrally broadband Licht¬quelle (22) by a fiber-optic Y-coupler in two optical fibers (36, 38) is coupled out to the measuring head (14).
    [21]
    21. The optical measuring method according to claim 14, wherein the reflection spectra of the first measuring beam (16) directed towards the carrier (8) and the second measuring beam directed towards the edge region (10) of the object (12) ) are digitized for evaluation.
    [22]
    22. Optical measuring method according to one of claims 14 to 21, wherein the surface of the edge region (10) of the object (12) and the surface of the carrier (8) are scanned at a scanning rate of over 4 kHz.
    [23]
    23. An optical measuring method according to any one of claims 14 to 22, wherein measurement errors are filtered out by an electronic digital filter (44) in the evaluation unit (32).
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    KR20160015374A|2016-02-12|
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102013010030|2013-06-17|
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